Semiconductor and display industries’s integration technology is improving with advanced precision manufacturing process. For this, the control of AMC,*—i.e. microparticles and gaseous components in cleanrooms—is required. ECOPRO provides the solution needed for electronic product production cleanrooms and the improvement of indoor air quality (IAQ) with research on high-functional adsorbents and chemical filters.* AMC stands for airborne molecular contamination and refers to VOCs, acid/alkaline gases, ozone, etc.
Major Research Areas
- Development of high-functional adsorbents and catalysts
- Development of chemical AMC purification filters for semiconductor and display fabrication and manufacturing equipment
- Development of technologies to remove bad odors and harmful gases
- Development of filters to improve indoor air quality (IAQ)